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ISBN:9781457717666

1electrostatic devices 1frequency measurement 1heating 1microsensors 1piezoelectric transducers 1position measurement 1radiofrequency oscillators 1silicon-on-insulator 1strain sensors 1varactors 1wireless sensor networks

1Bazaei, Ali 1Fowler, Anthony G. 1Laskovski, Anthony N. 1Yuce, Mehmet R.

Facets

1electrostatic devices 1frequency measurement 1heating 1microsensors 1piezoelectric transducers 1position measurement 1radiofrequency oscillators 1silicon-on-insulator 1strain sensors 1varactors 1wireless sensor networks

1Bazaei, Ali 1Fowler, Anthony G. 1Laskovski, Anthony N. 1Yuce, Mehmet R.

Title
Creator
Date

Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters

- Bazaei, Ali, Fowler, Anthony G., Moheimani, S. O. Reza

Creator: Bazaei, Ali , Fowler, Anthony G. , Moheimani, S. O. Reza
Resource Type: conference paper
Date: 2012

Ultra low frequency FM sensing of piezoelectric strain voltage

- Laskovski, Anthony N., Yuce, Mehmet R., Moheimani, S. O. Reza

Creator: Laskovski, Anthony N. , Yuce, Mehmet R. , Moheimani, S. O. Reza
Resource Type: conference paper
Date: 2012

1

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